JPH01157170U - - Google Patents
Info
- Publication number
- JPH01157170U JPH01157170U JP5210988U JP5210988U JPH01157170U JP H01157170 U JPH01157170 U JP H01157170U JP 5210988 U JP5210988 U JP 5210988U JP 5210988 U JP5210988 U JP 5210988U JP H01157170 U JPH01157170 U JP H01157170U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mounting table
- suspending
- fixing
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 210000000078 claw Anatomy 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000007791 liquid phase Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5210988U JPH01157170U (en]) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5210988U JPH01157170U (en]) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157170U true JPH01157170U (en]) | 1989-10-30 |
Family
ID=31278117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5210988U Pending JPH01157170U (en]) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157170U (en]) |
-
1988
- 1988-04-20 JP JP5210988U patent/JPH01157170U/ja active Pending